Thin-film bulk acoustic resonator - Wikipedia

Physical vapor deposition - Wikiwand

Piezoelectric Thin Film to Fabricate Solidly Mounted Resonator

Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

Film bulk acoustic resonators (FBARs) consist of a piezoelectric layer

File:Thin-film bulk acoustic resonator(FBAR) .png - Wikimedia Commons

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Thin Film: Deposition, PDF, Thin Film

A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO3 thin plate and SiO2/Ta multilayer acoustic films - IOPscience

PDF) Design and simulation of Bulk acoustic wave MEMS resonator

Micromachines, Free Full-Text

Design and Simulation of Bulk Acoustic Wave MEMS Resonator, PDF, Piezoelectricity